Establishment of A Full Functional Six-inch PHEMT Manufacturing Wafer Fab

Y.C. Pao, D. Glajchen
Filtronic Solid State, Inc., Santa Clara, CA  95054
R. Kerrigan, J. McEachran
Filtronic Compound Semiconductor Ltd., Newton Aycliffe, Durham, DL5 5FJ, UK

Filtronic Solid State is establishing a world-class six-inch wafer processing facility for high volume production of PHEMT products at Newton Aycliffe, UK, and a full functional six-inch R&D and MMIC phototyping wafer processing facility in Santa Clara, CA.  The production facility in UK has 310,000 sq ft. facility with over 100,000 sq ft of clean room half of which is at class 10 standard.  This facility will rank among the first and largest 6" GaAs wafer processing foundries in the world.  The GaAs wafer processing capabilities include MBE PHEMT material growth, stepper and E-beam photolithography, with a maximum throughput of approximately 170,000 wafers per year.